High-rate ultrasonic polishing of polycrystalline diamond ...
2016-6-1 · We demonstrate high-rate polishing of free-standing polycrystalline CVD diamond films by ultrasonic machining (USM) in a slurry of diamond grit. The material removal with the rate of 3 μm/min occurs via micro-chipping by bombarding abrasive diamond particles moved by the ultrasonic instrument.
Get Price